scoutGX is a fully automated system for the online monitoring of metallic and nanoparticle contaminants in ultrapure non-toxic semicondutor process gases.
Real-time Monitoring
- Automated process gas monitoring
- Immediate detection and notification of contamination
- Up to 16 process gas connections
- Monitors CO2, N2, O2, Ar, He, Ne and others
Inline Gas Exchanger
- Eliminates manual sampling
- Eliminates chemical hazards associated with traditional trapping techniques
- Lowers detection limits
- Detects metallic and nanoparticle contamination
Ease of Use
- Simultaneously determine nanoparticle and total metals data
- Autocalibration
- ppt to sub-ppt concentrations
- sensitive and precise nanoparticle measurement
- Flexible reporting options including SECS/GEM
Workflow Diagram
Example diagram (shown to the right) for direct monitoring of semiconductor process gases.