Fully Automated Online Process Gas Monitoring


scoutGX is a fully automated system for the online monitoring of metallic and nanoparticle contaminants in ultrapure non-toxic semicondutor process gases.


Real-time Monitoring

  • Automated process gas monitoring
  • Immediate detection and notification of contamination
  • Up to 16 process gas connections
  • Monitors CO2, N2, O2, Ar, He, Ne and others

Inline Gas Exchanger

  • Eliminates manual sampling
  • Eliminates chemical hazards associated with traditional trapping techniques
  • Lowers detection limits
  • Detects metallic and nanoparticle contamination

Ease of Use

  • Simultaneously determine nanoparticle and total metals data
  • Autocalibration
    • ppt to sub-ppt concentrations
    • sensitive and precise nanoparticle measurement
  • Flexible reporting options including SECS/GEM


Workflow Diagram

Example diagram (shown to the right) for direct monitoring of semiconductor process gases.